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第462章 叶海亚考察(2 / 2)

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长春国科精密前身为中国科学院长春光学精密机械与物理研究所超精密光学工程研究中心。其核心产品主要包括高端投影光刻机曝光光学系统和超精密光机制造与检测设备。公司成立于2014年8月,公司总部位于吉林省长春市,并在沪市设有投影光刻照明系统研发事业部。

长春国科精密公司在极大规模集成电路光刻投影光学、显微光学、多光谱融合成像探测、超精密光机制造等领域有着超高技术研究,并开展相应高端光学仪器与装备产品的研发工作,并建成了价值高达5亿元的超精密光机系统研发与制造平台。

公司历年承担国家科技重大专项核心光学项目,如IC制造高端投影光刻机曝光光学系统产品的研制,标志着我国超精密光学技术已跻身国际先进行列。此外,长春国科精密公司还承担了等多种类型高端IC制造投影光刻机曝光光学系统的技术研发及产业化推进工作。

可以说,在国内,在复杂精密光学仪器开发与制造行业,无人能出其右者,是当之无愧的行业老大。

长春国科精密副董事长、光刻联盟公司董事于在洪对叶海亚总经理的到来表示热情欢迎。他带领叶海亚参观了国内最大的顶尖的超净厂房,参观了那个价值高达5亿元的超精密光机系统研发与制造平台。

在会谈阶段,于在洪汇报了长春国科精密近几年在光刻机曝光系统方面取得的重要突破:公司研制的国内首套数值孔径0.75的ArF曝光系统Epolith A075已经成功交付用户,实现了整机曝光分辨率85纳米的理想结果,进一步提升了我国超精密光学技术的国际地位。

同时,长春国科精密在超精密光学技术方面的有着深厚的积累,掌握了超精密光机系统协同设计、超精密机械结构设计、全频段亚纳米精度光学加工与检测等关键技术。公司的ArF曝光系统实现了全视场平均波像差优于4纳米、全视场平均畸变优于5.7纳米的核心指标。

叶海亚则对长春国科精密取得的各项令人侧目的成绩表示祝贺,他强调,光刻机曝光系统是光刻机的关键技术,希望长春国科精密公司在最求世界最顶尖的光学设备方向继续奋斗,为把我国国产高端光刻机早日面世而勤奋努力。

在技术指标方面,叶海亚向于在洪提出了“光刻联盟”的要求:长春国科精密新一代曝光系统出台时间不得晚于2023年年底,必须适配5纳米芯片制程。为此,“光刻联盟”将拨付10亿元作为增强研发一期经费。

随后,双方签署拨款协议,于在洪协议中郑重承诺:长春国科精密新一代曝光系统将按照协议约定,准时保质交货。

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